MEMS technology is a fascinating, dynamic field and we're always excited to read more about it or to share our own take on what's going on. Here are recent insights we’ve published or presented, as well as the latest news and opinions from us.
For Lidar, MEMS the Word
Autonomous Vehicles Engineering, October 2018
Tiny gimballed mirrors on chips are being developed that could improve the form factor and cost of automotive lidar.
Translational Engineering: Best Practices in Developing MEMS for Volume Manufacturing
Sensors and Materials, April 2018
How we ruggedize proof of concept prototypes for commercial production.
A High-speed Large-range Tip-tilt-piston Micromirror Array
IEEE Journal of Microelectromechanical Systems, December 2016
Micromirror arrays and the potential for advancing applications.
Finding a MEMS Foundry - A Roundtable Discussion
Electronics 360, July 2016
Advice on volume manufacturing of MEMS.
Making Sensors for the IoT
ANSYS Advantage, June 2016
Leveraging simulation to reduce sensor development cost.
Achieving System Cost Reduction and Performance Optimization through Semi-Custom MEMS Pressure Sensors
Sensors Magazine, Jan 2015
Using RocketMEMS® sensors to optimize sensor system design.
Choosing MEMS Pressure Sensors for Medical Device Applications
Medical Design Briefs, Nov 2014
Customizing MEMS sensors for medical applications.
Through Silicon Vias in MEMS Product Development
Chip Scale Review, Mar-Apr 2011
How we implement standard through silicon vias (TSV) in MEMS prototypes to accelerate development.
MEMS Structural Reliability and DRIE
White paper, July 2010
Deep reactive ion etch (DRIE) is an essential MEMS fabrication process technology that leaves behind a scalloped surface prone to fracture. Smoother surfaces require slower etches, which are more costly. How smooth is smooth enough?
A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices
IEEE Journal of Microelectromechanical Systems, Aug 2009
We describe and validate a new failure prediction methodology specifically designed for single-crystal microelectromechanical systems (MEMS) devices under general service loadings.
Emerging MEMS & Sensor Technologies to Watch
Semicon West, July 2018
Recent Innovations in MEMS Sensors for Position, Navigation, and Timing (PNT) Applications
Stanford PNT Symposium, Nov 2017
Fantastic Voyage: Macrotrends in Microsystems for Transcatheter Therapeutics
Transcatheter Cardiovascular Therapeutics (TCT), Nov 2017
Next Generation MEMS Manufacturing
The ConFab, May 2017
Development of a High Performance Micromirror Array Using the MEMS Ecosystem
MEMS & Sensors Technical Congress, May 2017
How to Successfully Transfer MEMS from a University Lab to a Commercial Foundry
Transducers, June 2015
Letting Process Drive Design: The RocketMEMS® Model
Semicon Europa, Oct 2014
MEMS Pressure Sensors for Medical Applications
MEPTEC Medical Electronics Symposium, Sept 2014
Implementing MEMS: Make vs. Buy?
Sensors Expo, June 2014
MEMS Structural Reliability and DRIE: How Are They Related?
MEMS Investor Journal Webinar, July 2010, sponsored by Tegal Corporation
Millar, Inc. Announces Collaboration Agreement with AMFitzgerald to Enhance OEM MEMS
Pressure Sensor Capabilities for the Medical Device Industry.