Integrated design-to-production service

 
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AMFitzgerald expedites the commercialization of thin-film PZT MEMS chip technologies through a strategic alliance with MEMS Infinity.

  • Unlocks commercial potential of emerging piezoelectric MEMS devices, such as:

    • ultrasound transceivers

    • micro-speakers

    • micro-mirrors

    • microfluidic actuators and valves
  • Pairs AMFitzgerald’s expertise in MEMS development with MEMS Infinity’s aerospace-grade prototyping and manufacturing capability in PZT MEMS
  • Facilitates global access to MEMS Infinity’s thin-film PZT, available for 150 and 200mm wafers.
  • Leverages proprietary data on thin-film PZT to improve accuracy of MEMS design and modeling, minimizing the need for design-build-test cycles and accelerating product development.

How it Works

Our integrated product development experience will guide you seamlessly from concept and prototype through test and volume fabrication.

  1. Engage AMFitzgerald to evaluate specifications, assess feasibility, and develop concepts

  2. AMFitzgerald creates a custom chip design based on MEMS Infinity processes

  3. MEMS Infinity prototypes the design on 150 or 200mm wafers with support from AMFitzgerald

  4. Begin volume ramp up in pilot production, focusing on yield improvement and test optimization

  5. Enter production stage and ongoing yield improvement at MEMS Infinity 

  • Phase 1: Feasibility


    Define project
    Sign contract
    Evaluate customer specification
    Develop concept
    Process integration design
    Evaluate risks
    Create a development plan

    Outcome: Report

  • Phase 2: Design


    Create MEMS chip design
    Process integration and risk mitigation
    Evaluate design using simulation and modeling
    Iterate and optimize design
    Prepare unit-cell mask layout

    Outcome: Device design report; unit cell mask layout, recommend shortloops and test structures

  • Phase 3: Prototype


    Prepare mask data, test structures and PCMs for tapeout
    Prepare runsheet and process plan
    In-line and end-of-line inspection and analysis
    Prototype iteration

    Outcome: Engineering samples

  • Phase 4: Pilot Production


    Sign off specifications
    Stabilize yield

    Outcome: Pilot silicon wafers optional: back-end, test, assembly services

  • Phase 5: Production


    Ramp up production and stabilize process
    Continuous yield improvement

    Outcome: Product silicon wafers optional: back-end, test, assembly services

Learn More

Select us as your partner to move your PZT MEMS device from concept to production.

 
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