Trends in Emerging MEMS
MEMS & Imaging Sensors Summit, November 2024

Accelerating Piezoelectric MEMS Product Development
SEMI MSIG Webinar, September 2024

Emerging MEMS Technology Trends
SemiconWest, July 2024

Prior Reports: 2023 | 2019 | 2018 | 2017 | 2016 | 2015

MEMS Product Development – Derisking the Transition to Production
Sensors Converge, June 2024

[Invited Talk] Forty Years of MEMS Innovation at Hilton Head Workshop: From Emerging Technologies to Commercial Product
Hilton Head Workshop, June 2024

Fast-tracking Time-to-Market and Mitigating Development Risk in MEMS: Tactics that Win
IEEE MEMS, January 2024

MEMS Product Development: Lab to Fab Technology Transfer
Lab2Fab Workshop, September 2022

Expanding the World of MEMS through Flat Panel Fabs
SEMI-MSIG Technical Congress, May 2022

Building the Metaverse: Scaling Production of PMUTs for the Future of Human Interaction
SEMI-MSIG Executive Congress, October 2021

The Rise of Piezoelectric MEMS
MEMS Engineer Forum Tokyo, April 2021

Cost Models for MEMS Product Development
MEMS Titans Webinar, April 2021

MEMS Technology Transfer to Foundry Production
SEMI-MSIG PNT Workshop, October 2019

Event-driven MEMS Sensors for Smart Safety Monitoring
MEMS Engineer Forum, Tokyo, Japan, April 2019

Recent Innovations in MEMS Sensors for Position, Navigation, and Timing (PNT) Applications
Stanford PNT Symposium, Nov 2017

Fantastic Voyage: Macrotrends in Microsystems for Transcatheter Therapeutics
Transcatheter Cardiovascular Therapeutics (TCT), Nov 2017

Next Generation MEMS Manufacturing
The ConFab, May 2017

Development of a High Performance Micromirror Array Using the MEMS Ecosystem
MEMS & Sensors Technical Congress, May 2017

AMFitzgerald Video Webinar: System, Package, and Chip Level MEMS Solution
or Presentation slides only (2.5 MB .pdf)

How to Successfully Transfer MEMS from a University Lab to a Commercial Foundry
Transducers, June 2015

Letting Process Drive Design: The RocketMEMS® Model
Semicon Europa, Oct 2014

MEMS Pressure Sensors for Medical Applications
MEPTEC Medical Electronics Symposium, Sept 2014

Implementing MEMS: Make vs. Buy?
Sensors Expo, June 2014

A New Wildfire Watchdog
IEEE Spectrum, November 2021
Alerts about forest fires shouldn’t depend on pets smelling smoke. We need smart infrastructure, and that needs zero-power sensors.

Funding the MEMS Product Development Journey
EE Times Europe, August 2021
How to have a successful journey through the wilderness of MEMS development.

MEMS in the Fight Against Covid-19
EE Times, April 2020
The race against time to fight the Covid-19 pandemic has motivated a global flurry of activity and collaboration by technology companies.

Ultraminiature MEMS Sensors for Improved Patient Outcomes
Medical Design Briefs, May 2019
Ultraminiature sensors (<1 mm in size) enable instrumentation of medical devices in order to advance monitoring capabilities, deliver new insight into complex cardiovascular cases, and optimize targeted treatment therapies.

The Internet of Disposable Things Will Be Made of Paper and Plastic Sensors
IEEE Spectrum, November 2018
For disposable sensors, silicon will never be the right fit—but cheaper tech is nearly here.

For Lidar, MEMS the Word
Autonomous Vehicles Engineering, October 2018
Tiny gimballed mirrors on chips are being developed that could improve the form factor and cost of automotive lidar.

Translational Engineering: Best Practices in Developing MEMS for Volume Manufacturing
Sensors and Materials, April 2018
How we ruggedize proof of concept prototypes for commercial production.

A High-speed Large-range Tip-tilt-piston Micromirror Array
IEEE Journal of Microelectromechanical Systems, December 2016
Micromirror arrays and the potential for advancing applications.

Finding a MEMS Foundry - A Roundtable Discussion
Electronics 360, July 2016
Advice on volume manufacturing of MEMS.

Making Sensors for the IoT
ANSYS Advantage, June 2016
Leveraging simulation to reduce sensor development cost.

Achieving System Cost Reduction and Performance Optimization through Semi-Custom MEMS Pressure Sensors
Sensors Magazine, January 2015
Using RocketMEMS® sensors to optimize sensor system design.

Choosing MEMS Pressure Sensors for Medical Device Applications
Medical Design Briefs, November 2014
Customizing MEMS sensors for medical applications.

Through Silicon Vias in MEMS Product Development
Chip Scale Review, Mar-Apr 2011
How we implement standard through silicon vias (TSV) in MEMS prototypes to accelerate development.

MEMS Structural Reliability and DRIE
White paper, July 2010
Deep reactive ion etch (DRIE) is an essential MEMS fabrication process technology that leaves behind a scalloped surface prone to fracture. Smoother surfaces require slower etches, which are more costly. How smooth is smooth enough?

A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices
IEEE Journal of Microelectromechanical Systems, August 2009
We describe and validate a new failure prediction methodology specifically designed for single-crystal microelectromechanical systems (MEMS) devices under general service loadings.

MEMS Product Development: From Concept to Commercialization
Alissa M. Fitzgerald, Carolyn D. White, Charles C. Chung
Springer 2021.

Drawing on their experiences in successfully executing hundreds of MEMS development projects, the authors present the first practical guide to navigating the technical and business challenges of MEMS product development, from the initial concept stage all the way to commercialization. The strategies and tactics presented, when practiced diligently, can shorten development timelines, help avoid common pitfalls, and improve the odds of success, especially when resources are limited. MEMS Product Development illuminates what it really takes to develop a novel MEMS product so that innovators, designers, entrepreneurs, product managers, investors, and executives may properly prepare their companies to succeed.

Chapter 45: MEMS Inertial Sensors by Alissa M. Fitzgerald, published in:
Position, Navigation, and Timing Technologies in the 21st Century: Integrated Satellite Navigation, Sensor Systems, and Civil Applications
Editors: Y. Jade Morton, Frank Van Diggelen, James J. Spilker Jr., Bradford W. Parkinson, Sherman Lo, Grace Gao
Wiley 2021.

Featuring sixty-four chapters that are divided into six parts, this two-volume work provides comprehensive coverage of the state-of-the-art in satellite-based position, navigation, and timing (PNT) technologies and civilian applications. It also examines alternative navigation technologies based on other signals-of-opportunity and sensors and offers a comprehensive treatment on integrated PNT systems for consumer and commercial applications.

March 2025 | Leaping forward in 2025

Executive Viewpoint: 2025 – A Leap Forward for MEMS
MEMS technology is advancing rapidly, driven by innovation in materials, manufacturing, and applications. In this executive viewpoint, AMFitzgerald Founder & CEO Alissa Fitzgerald discusses how MEMS is leaping forward in 2025 with breakthroughs in sensing, actuation, and integration. With increasing adoption in sectors like healthcare, automotive, and consumer electronics, MEMS is enabling smarter, more efficient devices. Alissa also explores the growing role of artificial intelligence and machine learning in MEMS development, enhancing the adaptability and precision of today’s and tomorrow’s MEMS devices.
Read the full article in Semiconductor Digest

Photonics West 2025: A Dynamic Showcase
Photonics West was packed with buzzing conversations and a real sense of momentum in the photonics industry.

For us, this conference is always a highlight — a chance to connect with both vendors and clients across the entire supply chain. From materials to MEMS to fully integrated systems, the depth of participation was impressive.

Some key takeaways:
* Global engagement — a strong international presence with country pavilions from USA, Japan, Germany, Holland, and beyond.
* Foundries on the rise — exciting growth in photonic-specific foundry services, including thin-film lithium niobate and silicon nitride solutions.
* Nonstop energy — the industry is thriving, and it showed in every packed aisle, from the North Hall to the South Hall — and even in the hallways in between!

How Can PZT MEMS Work for You?
Last month, A.M. Fitzgerald and MEMS Infinity launched our new whitepaper, Unlocking Piezo MEMS for High-Value Applications. Learn how piezoelectric MEMS (piezoMEMS) architectures — which offer numerous advantages over capacitive MEMS architectures — are set to transform microelectronic products.
Download our whitepaper today

MEMS Infinity Design Challenge for Piezo MEMS
MEMS Infinity, the commercial MEMS foundry division of Sumitomo Precision Products Co., Ltd, is calling on engineers and researchers to push the boundaries of piezoelectric MEMS technology. Participants will have the chance to develop groundbreaking solutions that could impact industries ranging from medical diagnostics to industrial automation. This is a great opportunity to showcase innovative design, gain industry recognition, and contribute to the future of MEMS.
Take the MEMS Infinity Design Challenge

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